MOCVD Short Course

Andrey Bakin
Dr. Andrey Bakin received the Diploma in Electronic Engineering and a Ph.D. degree in Physics, both from the St.-Petersburg Electrotechnical University in 1981 and 1985, respectively and working there till 1988 on the growth of IV/VI compound semiconductors for optoelectronic applications. In 1988/1989 and in 1993 he worked at the Institute of Semiconductor Technology of the Technical University Braunschweig, Germany, on MOCVD growth of III/V compound semiconductors.

From 1989 to 1994 he developed the growth of SiC as senior researcher and assistant professor at the St.-Petersburg Electrotechnical University. In 1994/1995 he worked at the Department of Physics and Measurement Technology of Link?ping University, Sweden on the development of SiC HTCVD, CVD and sublimation growth. From 1995 to 1998 he was an associate professor at the St.-Petersburg Electrotechnical University, proceeding with the development of SiC growth and device fabrication. In 1998 he once more joined the Institute of Semiconductor Technology of the Technical University Braunschweig, Germany, where he finished his Habilitation (Dr.-Habil. thesis "Gas phase growth of compound semiconductors").

His main field of interest is fabrication of nanostructures, layers and crystals (ZnO, nitrides, SiC and III/V's) for optoelectronic, magnetoelectronic, sensoric and high temperature electronic applications. He is head of Epitaxial Growth and Nanotechnology group.

Bastian Marheineke
Dr. Bastian Marheineke

Director of Sales, AIXTRON AG

Bastian Marheineke graduated in Physics at RWTH Aachen and received his PhD from University of Ulm, working on MOCVD and PVD technologies for deposition of compound semiconductors. Having joined the Sales team of AIXTRON AG, Aachen, Germany, in 1998 he relocated to Cambridge, UK, early 2000, accepting the position of Sales Director of the newly acquired Thomas Swan Scientific Equipment, Ltd. subsidiary. Upon his return to Aachen mid 2002 Bastian was in charge of AIXTRON's Asia/Pacific sales. From 2003 to 2006 he was responsible for the business development of the OVPD? technology for organic materials. Since August 2006 Bastian is in charge of world wide Sales for AIXTRON's compound and organic semiconductor technologies.
Don Chang
In 1999, earned master degree of chemical engineering in Tsing Hua university, Taiwan.

2000~2002, as PECVD process engineer in Advanced Semiconductor Material, ASM, which is one of major silicon semiconductor equipment suppliers.
2002~2004, in integrated process dept. of SWENC, which is a touch panel major supplier in Taiwan.

2004~ , as process engineer in AIXTRON, specialize in CCS technology.

Joachim F. Woitok

Dr. Joachim F. Woitok received his Ph.D. degree in physics at the RWTH Aachen in Germany in 1989. In his thesis he studied the gas phase epitaxy (hot-wall technique) of pure and Thulium-doped EuSe. Until 1997 he worked as a researcher at the institute of physics of the RWTH Aachen.

His main interests were the characterization of epitaxial layer structures by means of a variety of techniques. Among them there was a specific focus on X-ray based methods.

He joined Philips Analytical (now PANalytical) in 1998, the world's leading supplier of X-ray analytical solutions. Since that time he is working in the commercial department on application and product development for X-ray diffraction (XRD).

He is involved in all activities of high-resolution XRD and X-ray reflectometry. Currently he coordinates PANalytical's worldwide activities in the market segment of advanced materials and thin films.

Michael Heuken
Prof. Dr. Michael Heuken was born in Oberhausen, Germany on November 17, 1961. He received the Diplom?Ingenieur degree and the Dr.?Ing. degree in Electrical Engineering from Duisburg University in 1985 and 1989, respectively.

He joined the Institut f��r Halbleitertechnik at RWTH Aachen as senior engineer and has been working in the field of metalorganic vapor phase epitaxy for electronic and optoelectronic devices. In 1994 he finished his Habilitation in semiconductor technology and devices with a thesis on MOCVD technology for optoelectronic devices. Since then and still at present he has been lecturer for semiconductor technology and devices as well as circuits for communication systems at RWTH.

In 1997 he joined AIXTRON AG in Aachen-Germany where he is now Vice President Corporate Research & Development. In 1999 he was honored as Professor at RWTH Aachen. His main research interests are in the fields of Semiconductor growth by MOVPE, materials characterization, device technology, electronic and optoelectronic devices and circuits.

Prof. Heuken is author and co-author of more than 300 publications in international journals and several invited papers at international conferences. He was President of DGKK (German Crystal Growth Association) from 2002 to 2005, is currently elected Executive Committee member of the IOCG (International Organization of Crystal Growth), member of VDE/ITG and board member of OptechNet e.V. He acts as referee for international Journals. He has been granted several patents in the field of CVD technology.

Ping Gong
Dr. Ping Gong is Akzo Nobel HPMO Technical Marketing Manager for Great China. He got his PhD in Opto-Electronic Materials at Xian Institute of Optics and Precision Mechanics, Chinese Academy of Sciences.

He had spent over 7 years at IQE, a UK leading supplier of epitaxial wafers, and as such has a wealth of hands-on MOCVD growth experience across a very diverse range of both GaAs and InP based compound semiconductors devices.

Joined Akzo Nobel HPMO in 2005 he is based in Shanghai now. He is responsible for market support for China, Singapore, and Taiwan.

rer. nat. Kolja Haberland
Dr. rer. nat. Kolja Haberland

1998 graduated in Physics at Technical University of Berlin main focus on semiconductor physics

1999 co-founder of company LayTec-optical sensors for epitaxy

2002 PhD in Physics at Technical University of Berlin about optical in-situ monitoring during epitaxial growth,

numerous talks on international conferences and workshops and publications in scientific journals

"Carl-Ramsauer Prize"of the Berlin Physical Society

since 2002 senior manager at LayTec, head of customer support department

Shouyin Wang
Dr. Shouyin Wang graduated from the University of Science and Technologies of China in 1983 with a BSc in Solid State Physics. He then obtained an MSc in opto electronics from Changchun Institute of Physics, Chinese Academic of Science in 1986. After completing his PhD degree in Heriot-Watt University, Edinburgh in 1994, he joined Bio-Rad Micro-measurement Division (acquired by Accent in 2000, sequentially by Nanometrics in 2006) as Application Scientist, Principal Engineer and later became the Applications Manager.

His main area of expertise is in the Physics and Applications for the Lattice Engineering product lines.

Dr. Wang has made major contributions in the development of several of Accent's products, including the RPM Photoluminescence mapping tool. Shouyin is currently the Director of Materials Physics Global Customer Support for Compound Semiconductor Market, Nanometrics.

Wei Zhang
Dr. Wei Zhang
studied (1990 �C 2001) at Hubei University, in Institute of Solid State Physics of Chinese Academy of Sciences, and at University Giessen in Germany

got Ph.D degree in 2001 for Semicondutor Physics at University Giessen in Germany.

joined AIXTRON AG since 2002 as process engineer for global service, technology transfer such as process Startup and support on material growth and design with MOCVD for Nitrides, Quaternary, and SiC, which are mostly LEDs of Blue/Green, Red/Yellow wavelength range, HEMT, HBT, and Lasers, et al..

currently as Department Manager China of AIXTRON AG, responsible for Service Department Management, Project Management, Technology Transfer and Academic Activities, Customers Service Operations and Satisfactions, Sales Support, Recruitment, and Logistics.